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File:64 nm pitch EUV shot noise.png

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64_nm_pitch_EUV_shot_noise.png (142 × 138 pixels, file size: 25 KB, MIME type: image/png)

Summary

Description
English: A set of holes patterned at 64 nm pitch shows significant effects of shot noise with an EUV dose of just over 10 mJ/cm2. A larger dose would result in the same range of variation over a larger sample size. Ref.: W. Gao et al., Proc. SPIE 8322, 83221D (2012).
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Source Graphic editor
Author Guiding light

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Original upload log

The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2017-07-19 04:33 142×138× (25918 bytes) Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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19 July 2017

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b98ad82fa405eabad2a55f59768c8b2af4446962

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Date/TimeThumbnailDimensionsUserComment
current08:21, 17 November 2018Thumbnail for version as of 08:21, 17 November 2018142 × 138 (25 KB)Tn4196Transferred from en.wikipedia via #commonshelper

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