Jump to content

File:EUV defect edge extension.png

From Wikipedia, the free encyclopedia

EUV_defect_edge_extension.png (400 × 306 pixels, file size: 9 KB, MIME type: image/png)

Summary

[edit]

The loss in reflectivity due to the slope corresponding to a defect edge. Outside the sloped region, the surface is assumed flat, giving the full reflectivity of the multilayer (angle of incidence is 6 degrees). Within the sloped region, the tilt results in incident light at the wrong angle of incidence, which reduces the multilayer reflectivity as the light deviates further from normal incidence.

The reference data for multilayer reflectivity vs. angle of incidence was obtained at the CXRO web site. The multilayer consists of 40 6.9 nm periods containing Si (60%) on Mo (40%) on an SiO2 substrate.

Licensing:

[edit]

Converted from Image:EUV_defect_edge_extension.JPG to PNG, original author User:Guiding light.

I, the copyright holder of this work, hereby publish it under the following licenses:
You may select the license of your choice.

File history

Click on a date/time to view the file as it appeared at that time.

Date/TimeThumbnailDimensionsUserComment
current10:14, 5 July 2008Thumbnail for version as of 10:14, 5 July 2008400 × 306 (9 KB)Hankwang (talk | contribs)Converted Image:EUV_defect_edge_extension.JPG to PNG.

The following page uses this file: